Materials engineering
 

To develop novel multifunctional Transition Metal Oxynitride (TM-O-N)

  To investigate the nature of TM-O-N
  - understanding of the electronic structure
  - understanding of the electronic properties
  - understanding of the crystallographic structure
  - understanding of the correlation between chemical composition , structure and properties
  To study the relationships between process parameters and materials properties
   
  Process development
  Reactive Gas Pulsing Process (RGPP) which will enable
  - to increase the deposition rate
  - to achieve adjustable and flexible chemical compositions (tuneable O/N ratios)
  - to maintain the process parameters stable